Vapor phase growth apparatus

ABSTRACT

Disclosed is a rotation/revolution type vapor phase growth apparatus that allows for automatic meshing between an external gear and an internal gear. In the apparatus, on tooth side surfaces of at least one kind of a plurality of external gear members provided rotatably in a circumferential direction of an outer periphery of a disk-shaped susceptor and a ring-shaped fixed internal gear member having an internal gear to mesh with the external gear members, there is provided a guide slope that abuts against a tooth side surface of the other kind of the gear member(s) to guide both kinds of the gear members into a meshed state when both kinds of the gear members move from a non-meshed state to the meshed state.

TECHNICAL FIELD

The present invention relates to a vapor phase growth apparatus, and inparticular, to a rotation/revolution type vapor phase apparatus thatperforms vapor-phase growth of a semiconductor thin film on a surface ofa substrate while rotating/revolving the substrate.

BACKGROUND ART

As a vapor phase growth apparatus that allows for vapor phase growth onmany substrates at a time, there is known a rotation/revolution typevapor phase growth apparatus in which a plurality of rotation susceptorsare arranged in a circumferential direction of an outer periphery of arevolution susceptor, and an external gear is provided at outerperipheries of the rotation susceptors to mesh a fixed internal gearprovided in a chamber with the external gear, thereby rotating/revolvingthe substrates during film deposition (for example, see PatentLiterature 1).

PRIOR ART REFERENCE Patent Literature

-   Patent Literature 1: JP-A-2007-243060

SUMMARY OF THE INVENTION Problems to be Solved by the Invention

In a rotation/revolution type vapor phase growth apparatus as describedabove, detachment of the revolution susceptor for substrate replacementwork or maintenance work causes the fixed internal gear and the externalgear to be unmeshed. Thus, upon attachment of the revolution susceptorafter the work, the fixed internal gear and the external gear need to bemanually meshed with each other into a predetermined state. In the caseof providing a large number of rotation susceptors, even only theconfirmation of meshed state has taken a lot of trouble and time.Additionally, when the fixed internal gear and the external gear were ina non-meshed state, the revolution susceptor was brought into a largelyinclined state, whereby large force acted on the gears, which had apossibility of causing a defect in the gears.

Therefore, it is an object of the present invention to provide arotation/revolution type vapor phase growth apparatus that allows forautomatic meshing between an external gear and an internal gear.

Means for Solving the Problems

As a first structure of the vapor phase growth apparatus of the presentinvention, in a vapor phase growth apparatus having arotation/revolution mechanism including a disk-shaped susceptor providedrotatably in a chamber, a plurality of external gear members providedrotatably in a circumferential direction of an outer periphery of thesusceptor, and a ring-shaped fixed internal gear member having aninternal gear to mesh with the external gear members, at least one ofthe susceptor and the internal gear member is formed movably in arotational axis line direction to a position of a meshed state where theexternal gear members and the internal gear member mesh with each otherand to a position of a non-meshed state where both kinds of the gearmembers are apart from each other in the rotational axis line direction,and, on a tooth side surface of at least one kind of both kinds of thegear members, there is provided a guide slope that abuts against a toothside surface of the other kind of both kinds thereof to guide both kindsof the gear members into the meshed state when both kinds of the gearmembers move from the position of the non-meshed state to the positionof the meshed state.

As a second structure of the vapor phase growth apparatus of the presentinvention, in a vapor phase growth apparatus having arotation/revolution mechanism including a disk-shaped susceptor providedrotatably in a chamber, a plurality of external gear members providedrotatably in a circumferential direction of an outer periphery of thesusceptor, and a ring-shaped fixed internal gear member having aninternal gear to mesh with the external gear members, a pair of upperand lower susceptor height adjusting members is opposingly providedbetween an upper surface of a shaft member supporting and rotating thesusceptor and a lower surface of a center portion of the susceptor, and,on an opposing surface of each of the susceptor height adjustingmembers, there is formed, in a circumferential direction, a projectionsurface that projects toward the opposing susceptor height adjustingmember, the susceptor height adjusting members being formed such that,when the projection surfaces are abutted against each other, thesusceptor height adjusting members support the susceptor at a higherposition than a position of the susceptor during film deposition tobring the external gear members and the internal gear member into ameshed state, and when ones of the projection surfaces having a smallprojection size are abutted against each other, the susceptor heightadjusting members support the susceptor at the position during filmdeposition to bring the external gear members and the internal gearmember into a predetermined meshed state.

As a third structure of the vapor phase growth of the present invention,in a vapor phase growth apparatus having a rotation/revolution mechanismincluding a disk-shaped susceptor provided rotatably in a chamber, aplurality of external gear members provided rotatably in acircumferential direction of an outer periphery of the susceptor, and aring-shaped fixed internal gear member having an internal gear to meshwith the external gear members, at least one of the susceptor and theinternal gear member is formed movably in a rotational axis linedirection to a position of a meshed state where the external gearmembers and the internal gear member mesh with each other and to aposition of a non-meshed state where both kinds of the gear members areapart from each other in the rotational axis line direction; on a toothside surface of at least one kind of both kinds of the gear members,there is provided a guide slope that abuts against the tooth sidesurface of the other kind of the gear member(s) to guide both kinds ofthe gear members into the meshed state when both kinds of the gearmembers move from the position of the non-meshed state to the positionof the meshed state; between an upper surface of a shaft membersupporting and rotating the susceptor and a lower surface of a centerportion of the susceptor, there is opposingly provided a pair of upperand lower susceptor height adjusting members, each of which hasprojection surfaces having different projection sizes formed on eachopposing surface thereof in a circumferential direction, the susceptorheight adjusting members being formed such that, when ones of theprojection surfaces having a large projection size are abutted againsteach other, the susceptor height adjusting members support the susceptorat a higher position than a position of the susceptor during filmdeposition to bring the external gear members and the internal gearmember into the meshed state on the guide slope, and when the ones ofthe projection surfaces having the large projection size are abuttedwith ones of the projection surfaces having a small projection size, thesusceptor height adjusting members support the susceptor at the positionduring film deposition to bring the external gear members and theinternal gear member into a predetermined meshed state.

ADVANTAGES OF THE INVENTION

According to the first structure of the vapor phase growth apparatus ofthe present invention, upon the attachment of the susceptor, when theexternal gear members and the internal gear member move from thenon-meshed state to the meshed state, the guide slope can guide bothkinds of the gear members into the meshed state. Usually, both kinds ofthe gear members are surely guided into the meshed state only byslightly turning in either direction the external gear members providedin a freely rotatable state with respect to the susceptor. Therefore, itis also possible to automate the detachment of the susceptor byeliminating manual meshing work.

According to the second structure of the vapor phase growth apparatus ofthe present invention, upon the attachment of the susceptor, thesusceptor is supported at a higher position than the position of thesusceptor during film deposition by means of the susceptor heightadjusting members. Thereby, the external gear members do not largelyincline even when the external gear members and the internal gear memberare brought into the non-meshed state. Thus, no defect occurs in thegears. The shaft member rotates the susceptor in the state of beingsupported at a higher position than during film deposition, whereby theexternal gear members and the internal gear member are brought from thenon-meshed state into the meshed state. Accordingly, by supporting thesusceptor at the position during film deposition by the susceptor heightadjusting members, the external gear members and the internal gearmember can be brought into a predetermined meshed state and also theposition of the susceptor in the chamber can be set to a predeterminedheight.

According to the third structure of the vapor phase growth apparatus ofthe present invention, occurrence of a defect in the gears can be moresurely prevented, as well as a transition from the non-meshed state tothe meshed state in the external gear members and the internal gearmember can be more surely achieved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional front view showing a first embodimentexample of a vapor phase growth apparatus according to the presentinvention.

FIG. 2 is a cross-sectional front view of a main part showing asituation in which a susceptor and an external gear member have beenmoved relatively with respect to each other in a rotational axis linedirection.

FIG. 3 is a plan view showing one shape example as a guide slopeprovided on a tooth side surface of a gear member.

FIG. 4 is a front view showing a portion of a tooth of the same gearmember.

FIG. 5 is a cross-sectional view taken along line V-V of FIG. 3.

FIG. 6 is a plan view showing another shape example as a guide slopeprovided on a tooth side surface of a gear member.

FIG. 7 is a front view showing a portion of a tooth of the same gearmember.

FIG. 8 is a cross-sectional view taken along line VIII-VIII of FIG. 6.

FIG. 9 is a cross-sectional front view showing a second embodimentexample of the vapor phase growth apparatus according to the presentinvention.

FIG. 10 is a cross-sectional front view showing a susceptor heightadjusting member.

FIG. 11 is a plan view of the susceptor height adjusting member providedon an upper surface of a shaft member.

FIG. 12 is a bottom surface view of a susceptor height adjusting memberprovided on a lower surface of a center portion of a susceptor.

FIG. 13 is an illustrative view showing a situation in which thesusceptor is supported by the susceptor height adjusting members at ahigher position than a position of the susceptor during film deposition.

FIG. 14 is an illustrative view showing a situation in which thesusceptor is supported by the susceptor height adjusting members in theposition thereof during film deposition.

MODES FOR CARRYING OUT THE INVENTION

A vapor phase growth apparatus shown in FIGS. 1 to 8 shows a firstembodiment example of the present invention. The vapor phase growthapparatus includes a disk-shaped susceptor 12 provided rotatably in achamber 11, a ring-shaped bearing member 13 provided in each of aplurality of a circular openings 12 a formed in a circumferentialdirection of an outer periphery of the susceptor 12, an external gearmember (a rotation susceptor) 14 each mounted rotatably via a pluralityof rolling members (balls) 13 a on each bearing member 13, a ring-shapedfixed internal gear member 15 to mesh with the external gear member 14,a heating unit (heater) 17 for heating a substrate 16 retained on asurface of the external gear member 14 from a back surface side of thesusceptor 12, and a flow channel 18 for guiding a raw material gas in adirection parallel to the surface of the substrate 16.

At a lower portion of a center of the susceptor 12 is provided a shaftmember 19 for rotating the susceptor 12, and at an upper portion of acenter of the flow channel 18 is provided a gas introducing portion 20for introducing the raw material gas into the flow channel 18. On anouter periphery of the flow channel 18 is provided a plurality of gasdischarging portions 21.

In a state in which the bearing member 13 and the external gear member14 are assembled together and the substrate 16 is retained on theexternal gear member 14, a lower surface of the bearing member 13 and alower surface of the external gear member 14 are formed to be flush witha lower surface of the susceptor 12, and an outer peripheral uppersurface of the external gear member 14 and an upper surface of thesubstrate 16 are formed to be flush with an upper surface of thesusceptor 12.

Either one or both of the susceptor 12 and the fixed internal gearmember 15 are provided movably in a rotational axis line direction (anup-and-down direction). Upon substrate replacement work, maintenancework, or the like, as shown in FIG. 2, the bearing member 13 and theexternal gear member 14, together with the susceptor 12, are moved to aposition apart above the fixed internal gear member 15, and an externalgear 14 a of the external gear member 14 and an internal gear 15 a ofthe fixed internal gear member 15 are moved from a meshed state positionshown in FIG. 1 to a non-meshed state position shown in FIG. 2.

Upon assembly of the susceptor 12 to the fixed internal gear member 15after completion of the substrate replacement work, maintenance work, orthe like, to bring the external gear 14 a of the external gear member 14and the internal gear 15 a of the fixed internal member 15 in thenon-meshed state into the meshed state, on a tooth side surface of atleast one of the gear members of the external gear 14 a and the internalgear 15 a is provided a guide slope that abuts against a tooth sidesurface of the other gear member to guide both gear members into themeshed state.

Guide slopes 31 shown in FIG. 3 to FIG. 5 are obtained by forming oneside surface of a tooth 33 of a gear member 32 into a mountainous shapehaving inclined planes. By providing such guide slopes 31 respectivelyon opposing side surfaces of the external gear 14 a of the external gearmember 14 and the internal gear 15 a of the fixed internal gear member15, the guide slopes 31 provided on the tooth side surfaces of bothgears are brought into a state of being abutted against each other iftooth positions of both gear members are displaced when moving from thenon-meshed state position shown in FIG. 2 to the meshed state positionshown in FIG. 1. In this case, the fixed internal gear member 15 isfixed to the chamber 11 and the external gear member 14 is provided in afreely rotatable state on the susceptor 12 by the bearing member 13.Thus, the external gear 14 a of the external gear member 14 is guided bythe guide slopes 31, whereby the external gear member 14 is slightlyturned, resulting that teeth of the external gear 14 a enter betweenteeth of the internal gear 15 a to bring the external gear 14 a and theinternal gear 15 a into a predetermined meshed state.

In addition, a guide slope 41 shown in FIG. 6 to FIG. 8 is obtained byforming an entire part of one side surface of a tooth 43 of a gearmember 42 into an inclined plane. On the external gear 14 a and theinternal gear 15 a opposing each other is provided respectively theguide slope 41 for inclining in the same direction upon abutment of bothgears. Thereby, when the guide slopes 41 are abutted against each other,the external gear member 14 is slightly turned such that the externalgear 14 a moves along inclinations of both guide slopes 41 and the teethof the external gear 14 a enter between the teeth of the internal gear15 a to bring both gears 14 a and 15 a into a predetermined meshedstate.

As described above, by providing the guide slopes 31 or the guide slope41 for guiding the teeth of the gears in the non-meshed state into themeshed state, upon assembly of the susceptor 12 fitted with the bearingmember 13 and the external gear member 14 to the fixed internal gearmember 15, the guide slope(s) can automatically and surely bring theteeth of the external gear 14 a and the teeth of the internal gear 15 ainto a predetermined meshed state even if the teeth of the external gear14 a and the teeth of the internal gear 15 a are displaced toward eachother and brought into the non-meshed state. Additionally, by assemblingthe fixed internal gear member 15 to the susceptor 12 that is beingrotated at an appropriate speed, both gears 14 a and 15 a can moresmoothly mesh with each other. In terms of rotation of the susceptor 12,for example, the susceptor 12 may be rotated approximately two to threetimes at a slower rotation speed than a rotation speed during filmdeposition or may be rotated only in one direction.

The shapes and combinations of respective constituent members can beappropriately determined according to the dimensions of the vapor phasegrowth apparatus, the number of substrates processed one time, thedimensions of the substrate, the kind of the raw material gas, and thelike. An open and close mechanism of the chamber and a carryingmechanism of the susceptor are arbitrary. In addition, depending onconditions of the gears, the guide slope(s) may be provided only on thetooth side surface of either one of the gears, or the guide slope(s) maybe curved surface(s).

A vapor phase growth apparatus shown in FIG. 9 to FIG. 14 shows a secondembodiment example of the present invention. In the descriptionhereinbelow, the same reference numerals will be given to the sameconstituent elements as those of the vapor phase growth apparatus shownin the first embodiment example above and detailed explanation thereofwill be omitted.

The vapor phase growth apparatus shown in the present embodiment examplehas basically the same structure as that of the vapor phase growthapparatus shown in the above first embodiment example. The disk-shapedsusceptor 12 provided rotatably in the chamber 11 is supported by theshaft member 19 via a pair of upper and lower susceptor height adjustingmembers 51 and 61 made of quartz, which are provided respectively on anupper surface of the shaft member 19 and the lower surface of the centerportion of the susceptor 12.

In the lower susceptor height adjusting member 51 provided on the uppersurface of the shaft member 19, stepped concave and convex portions 54are formed at an interval of 120 degrees, in which, in a circumferentialdirection of an upper-surface outer periphery of the member 51, threeprojection portions 52 upwardly projecting toward the opposing uppersusceptor height adjusting member 61 and three concave portions 53formed between the respective projection portions 52 are eachalternately formed to be grouped into three sets. Additionally, on aninner peripheral side of the stepped concave and convex portion 54 isformed a ring-shaped projection portion 55 upwardly projecting towardthe upper susceptor height adjusting member 61, and on an innerperipheral side of the ring-shaped projection portion 55 are formedscrew holes 57 through which eight screws 56 are inserted to mount thelower susceptor height adjusting member 51 to the upper surface of theshaft member 19. The screw holes 57 are formed at an equal interval ateight points in the circumferential direction. The lower susceptorheight adjusting member 51 is made of quartz and the shaft member 19 ismade of carbon. Thus, to bond the members made of the differentmaterials, both members are mechanically bonded together.

Meanwhile, in the upper susceptor height adjusting member 61 provided onthe lower surface of the center portion of the susceptor 12, a circularopening 62 having an inner diameter corresponding to an outer diameterof the ring-shaped projection portion 55 is formed at the centerportion, and, on an outer peripheral upper surface of the circularopening 62, is provided projectingly upwardly a ring-shaped fittingprojection portion 63 having an outer diameter corresponding to an innerdiameter of a fitting concave portion 12 b formed on the lower surfaceof the center portion of the susceptor 12. On a backside of thering-shaped fitting projection portion 63, is formed a stepped concaveand convex portion 64 corresponding to the projection portion 52 and theconcave portion 53 of the lower susceptor height adjusting member 51. Inaddition, on an outer periphery of the stepped concave and convexportion 64, is provided projectingly downwardly a ring-shaped projectionportion 65 having an inner diameter corresponding to an outer diameterof the lower susceptor height adjusting member 51. On an outer peripheryof the ring-shaped projection portion 65, is provided a flange 66 formounting the upper susceptor height adjusting portion 61 to the lowersurface of the center portion of the susceptor 12. The upper susceptorheight adjusting portion 61 is made of quartz and the susceptor 12 ismade of SiC-coated carbon. Thus, to bond together the members made ofthe different materials, the upper susceptor height adjusting member 61is provided with the flange 66, and for example, the members aremechanically bonded together by a screw hole and a screw that are notshown in the drawing.

The stepped concave and convex portion 64 of the upper susceptor heightadjusting member 61 includes a concave portion 67 formed at apredetermined interval in a circumferential direction, a steppedprojection portion 68 having a first projection portion 68 a and asecond projection portion 68 b projecting in a two-stepped shapedownwardly toward the lower susceptor height adjusting member 51, and arotation stopper convex portion 69 projecting more downwardly than theprojection portion 68, and three sets of the portions 67, 68, and 69 areprovided at an interval of 120 degrees in the circumferential directionof the member 61.

The concave portion 67 of the upper susceptor height adjusting member 61has a size capable of housing the projection portion 52 of the lowersusceptor height adjusting member 51, and the concave portion 53 of thelower susceptor height adjusting member 51 has a size capable of housingthe projection portion 68 and the whirl-stop convex portion 69 of theupper susceptor height adjusting member 61.

Projection heights of the first projection portion 68 a and the secondprojection portion 68 b of the projection portion 68 are appropriatelydetermined according to the thicknesses of the external gear member 14and the fixed internal gear member 15 and the presence or absence of theguide slope(s). Additionally, regarding the respective projectionportions 52, 68 a, and 68 b and the whirl-stop convex portion 69, whenthe shaft member 19 is rotated in a forward direction (a rotationdirection during film deposition) in a state in which the susceptor 12is mounted on the upper surface of the shaft member 19 via the susceptorheight adjusting members 51 and 61, rising portions (stepped portions)of the respective projection portions 52, 68 a, and 68 b and thewhirl-stop convex portion 69 are abutted against each other to serve totransmit the rotation of the shaft member 19 to the susceptor 12.

Upon setting of the susceptor 12 on the shaft member 19 after detachingthe susceptor 12 and finishing substrate replacement work, maintenancework or the like, as shown in FIG. 13, a leading end face of theprojection portion 52 of the lower susceptor height adjusting member 51and a leading end face of the projection portion 68 of the uppersusceptor height adjusting member 61, that is, in the present embodimentexample, a leading end face of either one of the first projectionportion 68 a and the second projection portion 68 b are brought into astate of being abutted against each other. In this way, by abutting theleading end faces of both projection portions 52 and 68 against eachother, the susceptor 12 is brought into a state of being supported withrespect to the shaft member 19 at a higher position than a height of thesusceptor 12 during film deposition.

In this manner, by supporting the susceptor 12 at a higher position thanthe height thereof during film deposition, the external gear member(rotation susceptor) 14 positioned on the outer periphery of thesusceptor 12 is situated at a higher position than the fixed internalgear member 15, whereby a lower portion of the external gear member 14and an upper portion of the fixed internal gear member 15 can be broughtinto a state of slightly meshing with each other, for example into a 1to 2 mm-meshed state. Accordingly, even when the external gear member 14and the internal gear member 15 are in the non-meshed state and theexternal gear 14 a of the external gear member 14 is in a state of beingdriven onto the internal gear 15 a of the internal gear member 15, theexternal gear member 14 does not largely incline, so that no defectoccurs in the gears.

Furthermore, even when the external gear member 14 and the internal gearmember 15 are in the non-meshed state, by forwardly rotating the shaftmember 19 in the state of supporting the susceptor 12 at a higherposition than the position during film deposition, the rising portionsof both projection portions 52 and 68 can be abutted against each otherto thereby transmit the rotation of the shaft member 19 to the susceptor12, as described above. Then, along with the rotation of the susceptor12, the external gear member 14 moves along an inner peripheral side ofthe fixed internal gear member 15. Thereby, when the external gearmember 14 reaches a position where the external gear 14 a and theinternal gear 15 a mesh with each other, the external gear 14 a that wasin the state of being driven onto the internal gear 15 a meshes with theinternal gear 15 a to be brought into the state shown in FIG. 13.

Accordingly, by rotating the susceptor 12 after setting the susceptor 12on the shaft member 19, for example, by rotating it approximately onetime at a slower rotation speed than a rotation speed during filmdeposition, the teeth of the external gear 14 a that was in the state ofbeing driven onto the internal gear 15 a fall between the teeth of theinternal gear 15 a, so that the external gear member 14 and the internalgear member 15 can mesh with each other.

When the shaft member 19 is rotated in a reverse direction after theexternal gear member 14 and the internal gear member 15 are brought intothe meshed state, the shaft member 19 rotates in the reverse directionin a state in which the susceptor 12 hardly rotates, since the susceptorheight adjusting members 51 and 61 are not provided with any projectionportion serving as a whirl stop to the reverse direction and anywhirl-stop convex portion. Thus, as shown in FIG. 14, the projectionportion 52 of the lower susceptor height adjusting member 51 is housedinto the concave portion 67 of the upper susceptor height adjustingmember 61, as well as the projection portion 68 and the whirl-stopconvex portion 69 of the upper susceptor height adjusting member 61 arehoused into the concave portion 53 of the lower susceptor heightadjusting member 51.

In this manner, by housing the respective projection portions 68 and 52in the respective concave portions 53 and 67, the susceptor 12 isbrought into the state of being supported at a position corresponding tothe height thereof during film deposition. Thereby, since the externalgear member 14 descends with respect to the fixed internal gear member15, the external gear member 14 and the fixed internal gear member 15are brought into a predetermined meshed state for film deposition.

In addition, when the guide slopes shown in the above first embodimentexample are provided, by setting the height of the susceptor 12 suchthat the external gear member 14 meshes with the fixed internal gearmember 15 on a portion of the guide slopes upon supporting of thesusceptor 12 at a higher position than during film deposition, themeshing between the external gear member 14 and the fixed internal gearmember 15 can be further ensured.

Additionally, the projection portion to be provided may be an onlyone-stepped portion, or the whirl-stop convex portion may be provided oneither one of the upper and lower susceptor height adjusting members.

DESCRIPTION OF REFERENCE NUMERALS

-   -   11 . . . Chamber    -   12 . . . Susceptor    -   12 a . . . Circular opening    -   12 b . . . Fitting concave portion    -   13 . . . Bearing member    -   13 a . . . Rolling member    -   14 . . . External gear member    -   14 a . . . External gear    -   15 . . . Fixed internal gear member    -   15 a . . . Internal gear    -   16 . . . Substrate    -   17 . . . Heating unit    -   18 . . . Flow channel    -   19 . . . Shaft member    -   20 . . . Gas introducing portion    -   21 . . . Gas discharging portion    -   31, 41 . . . Guide slope    -   32, 42 . . . Gear member    -   33, 43 . . . Tooth    -   51 . . . Lower susceptor height adjusting member    -   52 . . . Projection portion    -   53 . . . Concave portion    -   54 . . . Stepped concave and convex portion    -   55 . . . Ring-shaped projection portion    -   56 . . . Screw    -   57 . . . Screw hole    -   61 . . . Upper susceptor height adjusting member    -   62 . . . Circular opening portion    -   63 . . . Fitting projection portion    -   64 . . . Stepped concave and convex portion    -   65 . . . Ring-shaped projection portion    -   66 . . . Flange    -   67 . . . Concave portion    -   68 . . . Projection portion    -   68 a . . . First projection portion    -   68 b . . . Second projection portion    -   69 . . . Whirl-stop convex portion

1. A vapor phase growth apparatus having a rotation/revolution mechanismcomprising a disk-shaped susceptor provided rotatably in a chamber, aplurality of external gear members provided rotatably in acircumferential direction of an outer periphery of the susceptor, and aring-shaped fixed internal gear member having an internal gear to meshwith the external gear members, wherein at least one of the susceptorand the internal gear member is formed movably in a rotational axis linedirection to a position of a meshed state where the external gearmembers and the internal gear member mesh with each other and to aposition of a non-meshed state where both kinds of the gear members areapart from each other in the rotational axis line direction, and, on atooth side surface of at least one kind of both kinds of the gearmembers, there is provided a guide slope that abuts against a tooth sidesurface of the other kind of both kinds thereof to guide both kinds ofthe gear members into the meshed state when both kinds of the gearmembers move from the position of the non-meshed state to the positionof the meshed state.
 2. A vapor phase growth apparatus having arotation/revolution mechanism comprising a disk-shaped susceptorprovided rotatably in a chamber, a plurality of external gear membersprovided rotatably in a circumferential direction of an outer peripheryof the susceptor, and a ring-shaped fixed internal gear member having aninternal gear to mesh with the external gear members, wherein, betweenan upper surface of a shaft member supporting and rotating the susceptorand a lower surface of a center portion of the susceptor, there isopposingly provided a pair of upper and lower susceptor height adjustingmembers and, in a circumferential direction on an opposing surface ofeach susceptor height adjusting member, projection portions projectingtoward the opposing susceptor height adjusting member and concaveportions formed between the projection portions are each alternatelyformed to be grouped into a plurality of sets, in which when leading endfaces of the projection portions of the pair of the susceptor heightadjusting members are abutted against each other, the susceptor heightadjusting members support the susceptor at a higher position than aposition of the susceptor during film deposition to bring the externalgear members and the internal gear member into a slightly meshed state,and when the projection portions of the pair of the susceptor heightadjusting members are positioned inside the concave portions, thesusceptor height adjusting members support the susceptor at the positionthereof during film deposition to bring the external gear members andthe internal gear member into a predetermined meshed state.
 3. A vaporphase growth apparatus having a rotation/revolution mechanism comprisinga disk-shaped susceptor provided rotatably in a chamber, a plurality ofexternal gear members provided rotatably in a circumferential directionof an outer periphery of the susceptor, and a ring-shaped fixed internalgear member having an internal gear to mesh with the external gearmembers, wherein at least one of the susceptor and the internal gearmember is formed movably in a rotational axis line direction to aposition of a meshed state where the external gear members and theinternal gear member mesh with each other and to a position of anon-meshed state where both kinds of the gear members are apart fromeach other in the rotational axis line direction; on a tooth sidesurface of at least one kind of both kinds of the gear members, there isprovided a guide slope that abuts against a tooth side surface of theother kind of both kinds thereof to guide both kinds of the gear membersinto the meshed state when both kinds of the gear members move from theposition of the non-meshed state to the position of the meshed state;and, between an upper surface of a shaft member supporting and rotatingthe susceptor and a lower surface of a center portion of the susceptor,there is opposingly provided a pair of upper and lower susceptor heightadjusting members, in which, in a circumferential direction on anopposing surface of each susceptor height adjusting member, projectionportions projecting toward the opposing susceptor height adjustingmember and concave portions formed between the projection portions areeach alternately formed to be grouped into a plurality of sets, and whenleading end faces of the projection portions of the pair of thesusceptor height adjusting members are abutted against each other, thesusceptor height adjusting members support the susceptor at a higherposition than a position of the susceptor during film deposition tobring the external gear members and the internal gear member into themeshed state on the guide slope, whereas when the projection portions ofthe pair of the susceptor height adjusting members are positioned insidethe concave portions, the susceptor height adjusting members support thesusceptor at the position during film deposition to bring the externalgear members and the internal gear member into a predetermined meshedstate.